Design and implementation of a novel horizontal AFM probe utilizing a quartz tuning fork. Design and calibration of “isara 400” ultra-precision CMM.

Spaan, H., Widdershoven, I., & Donker, R. Investigation of a three-dimensional micro-scale sensing system based on a tapered self-assembly four-cores fiber bragg grating probe. Kunpeng, F., Jiwen, C., Xun, S., Hong, D., Tangjun, S., Yizhao, N., et al. Four-cores FBG probe based on capillary self-assembly fabrication technique for 3D measurement. Measurement Science and Technology, 29, 054012.įeng, K., Cui, J., Dang, H., Zhang, H., Zhao, S., & Tan, J. Fast and accurate: high-speed metrological large-range AFM for surface and nanometrology. Developing a novel tri-switch tactile probing structure and its measurement characteristics on micro-cmm. International Journal of Precision Engineering and Manufacturing., 20(2), 193–199. Touch probe tip compensation using a novel transformation algorithm for coordinate measurements of curved surfaces. International Journal of Precision Engineering and Manufacturing., 16(5), 883–893.Īhn, H. Implementation of capacitive probes for ultra-high precision machine for cylindricity measurement with nanometre level of accuracy. This probe can be used as the trigger probe of micro/nano CMM, which can be triggered by interatomic force.Īlain, V., Hichem, N., Mohamed, D., et al. Experimental results verify that the proposed probe has the advantages of small size, sub-nano resolution and very low probing force. The probing forces in the X, Y and Z directions are 2.25, 1.81 and 4.24 μN, respectively. The trigger resolution of the probe in the X, Y and Z directions are 0.44, 0.41 and 0.34 nm, respectively.

In this study, the diameter of the probe microsphere can be as low as 80 μm, and the length of the probe stylus is approximately 5 mm. The 3D nano-positioning of the probe is achieved by the changes in resonance parameter caused by the interatomic force between the microsphere and the surface of the measured sample. It vibrates in resonance state and makes contact with the measured surface in the Z direction in tapping mode, while in the X and Y directions, it operates in friction mode. The probe is composed of a quartz tuning fork, a tapered optical fiber stylus and a microsphere. To realize the high-precision three-dimensional (3D) measurement of micro-precision devices, a 3D resonant trigger probe based on quartz tuning fork for micro/nano coordinate measuring machine (CMM) is proposed.

Resonant frequencies of a tuning fork